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Test & Measurement Source Measure Units - SMUs

Manufacturer = Keithley Instruments, Inc.

Voltage Range	Resistance Range	Capacitance Range	Accuracy
100 mV to 40 V 200 mV to 1 kV 200 mV to 100 V 200 mV to 100 mV 200 mV to 200 V Reset	1 mOhms to 5 kOhms 200 mOhms to 200 MOhms 500 mOhms to 10 MOhms 500 mOhms to 200 Ohms 2 Ohms to 20 TOhms 2 Ohms to 200 MOhms 2 Ohms to 200 Mohms 10 kOhms 10 GOhms Reset	100 pF to 450 pF 10 nF to 50 uF 0.02 uF Reset	0.002 % 0.012 % 0.015 % 0.02 % 0.2 % 5 % ≤ ≥ Reset

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